Manual Version e1-4.3.0.ae-R3. Page
Process Purge Low
Allows the user to set the vacuum pressure for the process chamber purge cycles during the machine
startup.
Exp Purge Cycles
Allows the user to set the number of purge cycles for expansion chamber during the machine startup.
Exp Purge High
Allows the user to set the nitrogen pressure for expansion chamber purge cycles during the machine
startup.
Exp Purge Low
Allows the user to set the vacuum pressure expansion chamber purge cycles during the machine
startup.
Flush Cycles
Allows the user to set the number of flush cycles during the machine startup.
A flush cycle consists of:
• 20 seconds that V7, V5, V3, and V11 are open
• 20 seconds that V7, V5, V3, V11, and V6 are open
• 20 seconds that V3, V11, and V6 are open
• 20 seconds that V3 and V8 are open
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