Orbotech SPTS Xactix e1 Series - Precautions and Safety Instructions; General Safety; Personal Protective Equipment (PPE)

Manual Version e1-4.3.0.ae-R3. Page
6
2 Precautions and Safety Instructions
WARNING
READ THIS MANUAL BEFORE INSTALLING AND U
SING
THE XACTIX E1 SERIES. FAILURE TO DO SO
COULD
RESULT IN HARM OR INJURY. ALSO, READ TH
E MSDS
FOR XENON DIFLUORIDE.
2.1 General Safety
CAUTION
XeF
2
: Service personnel must be aware of and understand
the risks of exposure to XeF
2
and its by-products.
2.2 Personal Protective Equipment (PPE)
Provided the system is process contaminant free, routine maintenance can be undertaken wearing a
face mask, ‘double-gloved’ nitrile gloves and chemically resistant safety goggles that comply with BS
EN 166 and/or ANSI Z87.1.
CAUTION
PPE for Non-
Vented Systems: When the system cannot be
vented, there are strict procedures that must be followed
and full PPE suitable for dealing with XeF
2
and its by-
products must be worn. P
lease refer to the MSDS for details
on the PPE and contact SPTS as soon as practicable for
instruction.
CAUTION
PPE Compliance: All PPE must be used in accordance with
the manufacturer’s instructions or local PPE requirements.