Manual Version e1-4.3.0.ae-R3. Page
• Packed Solid Reagent Beds into which the waste gas is passed.
The chemical reagents used in all such equipment shall be closely monitored to ensure continued
efficiency. The ‘spent’ scrubber liquid, or solid, will require disposal in an environmentally acceptable
manner.
2.6.3.3 Absorption
Some waste gases can be absorbed onto suitable materials, such as charcoal, molecular sieve and
chemically impregnated absorbent. These are often appropriate for localized equipment or gas cabinet
exhaust treatment, but usually still exhaust into a main duct leading to a main scrubber to ensure
absolute risk minimization. Again, ‘spent’ cartridges shall be correctly disposed to minimize
environmental impact.
2.7 Contamination
Processing with XeF2 will produce HF by-products and components in the gasbox, process chamber,
interconnecting pipework and gas train will become contaminated. The chamber vent procedure will
pump/purge the process chamber and gas train so that any remain contaminants will be below the
Threshold Limit Value (TLV). However the gasbox components such as valves, pressure sensors, and
MFC, if present and associated pipework may still contain above Threshold Limit Value (TLV).
contaminants.
2.8 Gas Lines (Toxic & Non-Toxic)
General Health Risk: When undertaking maintenance on
hazardous and non-
hazardous gas lines, warning notices
must be displayed to identify the status of specific gas line
valves and associated solenoid valves. When individual gas
line valves are shut, they must be locked shut to prevent
inadvertent operation.
General Health Risk: To prevent risk of personnel injury, the
helium leak check must be undertaken by technically
qualified personnel who are fully aware of all relevant
safety precautions associated with processing, operating
and maintaining the equipment
. In addition, such persons
must be capable of operating Xetch software.
General Health Risk: Before undertaking helium leak check,
always check the status of the chamber with the system’s
process engineer.
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