Orbotech SPTS Xactix e1 Series - Gas Bottle Change Parameters Menu

Manual Version e1-4.3.0.ae-R3. Page
77
5.4.7 Gas Bottle Change Parameters Menu
The maintenance parameters options screen is displayed on next page. Each of the options is briefly
explained
Pre-Change Cycles
Allows user to set the number of purge cycles prior to disconnecting the XeF2 lecture bottles.
Pre-Change High
Allows the user to set the nitrogen pressure for the purge cycles prior to disconnecting the XeF2 bottles.
Pre-Change Vac Time
Allows the user to set the amount of time that the vacuum valve is open prior to disconnecting the XeF2
bottles.
Closed Bottle Cycles
Allows user to set the number of purge cycles to remove atmospheric gas from the lines following a
XeF2 bottle change.
Closed Bottle High
Allows user to set the nitrogen pressure for the purge cycles following a XeF2 bottle change.
Closed Bottle Vac Time
Allows user to set vacuum time for the purge cycles following a XeF2 bottle change.