Orbotech SPTS Xactix e1 Series - Procedures and Schedules; Maintenance Procedures; Regular Inspection; Recommended Spare Parts

Manual Version e1-4.3.0.ae-R3. Page
88
6.4 Procedures and Schedules
6.4.1 Maintenance Procedures
Task
Approx. Frequency
Section
XeF2 Bottle Change
Annual
6.6
Pump Tip Seal Replacement
Annual
6.8
Chamber/Lid Clean
As needed
6.9
Showerhead Replacement
As needed
6.10
6.4.2 Regular Inspection
The following schedule for regular inspection of the system is recommended.
Task
Approx. Frequency
Specification
Check Internal Nitrogen Regulator Setting
Monthly
10 psi
Check CDA Attached Regulator Setting
Monthly
80 psi
Inspect Chamber O-ring
Monthly
No degradation or cuts
Check XeF2 Source Pressure
Monthly
Less than 15 Torr
Check base pressure of pump with absolute
pressure gauge
Twice Annually
Less than 70 mTorr
6.5 Recommended Spare Parts
The spare parts listed below are recommended to be kept in stock at all times so they will be available
when needed for routine maintenance. Additional spare parts, including those listed, are available in
various kits offered by SPTS. (Critical Spares and Extended Spares). Contact your SPTS service
representative for information for ordering these kits.
Part Number
Description
Qty
3006548
nXDS Tip Seal
1
VAH1112
O-RING VI 112
1
VAH1373
O-RING VI 2-373
1
VAB0037
6" ACRYLIC SHOWERHEAD ASSEMBLY
1
6.6 XeF
2
Bottle Change
6.6.1 Bottle Change General information
XeF
2
Counter Reset
Before proceeding with a bottle change, be aware that the XeF
2
usage display will be reset to zero once
the bottle is changed. You may wish to record the usage displayed before changing for your records.
The usage information can be found by clicking the Maintenance Menu. The information is located at
the top left under Approx. XeF
2
Usage.
Parts List
• Swagelok Gaskets (www.swagelok.com)
NI-4-VCR-2-VS or NI-4-VCR-2-GR-VS
• 5/8” and 3/4” Standard Wrenches
• Latex Gloves
Time allocation
The time to complete the bottle change is typically between 20 to 30 minutes.