Orbotech SPTS Xactix e1 Series - Uncrating, Storage, and Pre-Installation Checks

Manual Version e1-4.3.0.ae-R3. Page
20
4.1.7 Exhaust Requirements
There are three exhaust/ventilation connections to the e1 Series:
1. Exhaust connection from the vacuum pump, which is NW25
2. Ventilation connection from the chamber ventilation shroud, which is to be connected to a 3”
inside diameter hose
3. Ventilation connection from the gas box, which is to be connected to a 2” inside diameter hose
Flow
Pressure
Vacuum Pump Exhaust
7 m
3
/hr
Vacuum (typically -250 Pa)
Shroud Exhaust
170 m
3
/hr
-250 Pa Static Pressure
Gas Box Exhaust
15 m
3
/hr
-25 Pa Static Pressure
WARNING
THE EXHAUST GAS FROM THE OUTPUT PORT
OF THE E1
SERIES’S VACUUM PUMP MUST BE VENTE
D INTO A
SUITABLE FUME EXHAUST SYSTEM. ANY FITTINGS
AND/OR TUBING REQUIRED SHOULD BE OBTAINE
D
LOCALLY.
WARNING
THE CUSTOMER SHOULD
SUPPLY EXHAUST
VENTILATION TO THE GAS BOX. THIS IS ACC
OMPLISHED
BY THE CUSTOMER CONNECTING A 2” INSIDE D
IAMETER
VENTILATED HOSE TO THE GAS BOX VENTILATI
ON
CONNECTION ON THE BACK OF THE FRAME.
WARNING
THE CUSTOMER SHOULD
SUPPLY EXHAUST
VENTILATION TO THE CHAMBER FUME SHR
OUD. THIS IS
ACCOMPLISHED BY THE CUSTOMER CONNECTING
A 3”
INSIDE DIAMETER VENTILATED HOSE TO THE C
HAMBER
FUME SHROUD VENTILATION CONNECTION ON TH
E
BACK OF THE CHAMBER FUME SHROUD.