Orbotech SPTS Xactix e1 Series - Pre-Installation Checklist

Manual Version e1-4.3.0.ae-R3. Page
22
4.2 Pre-Installation Checklist
Subject
Requirement
Yes
No
Comments
Space requirements
See above
Room temperature
65-75°F (19-24°C)
Minimize temperature
fluctuations
Relative humidity
40-70%
e1 Series and pump
mains supply
100-120 V ±10%
(optional 220-240 V
±10%) includes
transient fluctuation,
15 A
Single phase
50/60 Hz
Earthing
Consult local
requirements
Process gases
40 cu. ft. min,
Nitrogen, 20 psi outlet
Provide safety
overpressure device
for Nitrogen process
line
Max. 100 psi
One cylinder of xenon
difluoride for e1 Series
See below for bottle
and valve
CDA
Compressed, dry air,
70-100 psi
Gas box purge gas
Nitrogen, 5 psi : (some
systems do not require
this purge, please
contact SPTS for more
information)
Used to supply diluent
gas to gas box to flush
possible fumes
System exhausting
Gas box exhaust
connection
Fume exhaust to
vacuum pump outlet
100 cfm exhaust to
chamber area