Orbotech SPTS Xactix e1 Series - Scheduled Maintenance and Spare Parts; XeF2 Bottle Change and Flow Rate Adjustments

Manual Version e1-4.3.0.ae-R3. Page
86
Figure 35. Electrical plug lockout and tagout.
6.2.2 Gas Supply Disconnect and Lockout / Tagout
When working on the system the user should ascertain if there is any danger to themselves or the
system from the pressurized gasses delivered to the system. The required, customer supplied
regulators at the gas supply should be used to turn off the gas supply to the system and be the
customer supplied lockout / tagout procedure used to prevent accidental pressurization of the system.
The N
2
regulator inside of the gas box should also be reduced to zero psi (note that the N
2
regulator
inside of the system is not relieved so reducing the regulator will only prevent additional gas from
coming into the system – N
2
in the lines could be relieved by manually opening valve 8 after the
chamber has completed an unload operation – see Section 5.2.1). The CDA regulator on the rear of the
system should also be reduced to zero psi.