Orbotech SPTS Xactix e1 Series

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Manual Version e1-4.3.0.ae-R3. Page

Figure 12. Edwards nXDS6i pump

Figure 13. Pump ballast control should be set to open as show.

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Table of Contents3
Technical Specifications6
Precautions and Safety Instructions8
General Safety8
Personal Protective Equipment (PPE)8
Mechanical Safety9
Compressed Air10
Electrical Safety10
Live Works11
Gas Safety11
General12
Discovering a Gas Leak12
Treatment of Exhaust Gases12
Contamination13
Gas Lines (Toxic & Non-Toxic)13
Hazardous Substances14
Working with Hazardous Substances14
Spillage of Hazardous Substances14
Additional Safety Notes15
System Cleaning15
Unintended & Intended Releases15
Description of the Product; Composition of the Product16
Assembly; Installation; First Operation18
Preparation18
General Requirements of the Site18
Dimensions and Weights18
Space Requirements19
Electrical Services Required20
General Ambient Temperatures20
Gas Requirements21
Exhaust Requirements22
Installation Material23
Pre-Installation Checklist24
Cylinder and Valve for Xef225
Uncrating26
Receiving the System26
Storing the System before Installation26
Uncrating the System27
Setup30
Initial Start-Up41
Safety Verification41
Power up and EMO Reset41
Description of Operation; Method of Use44
E1 Series Log in45
Main Menu46
Sample Loading46
Viewing the Log50
Other Main Menu Items54
Software Operation Details55
Recipe Storage55
Recipe Manager55
Performing an Etch56
Etch Menu Features57
Performing an Etch in the Normal Mode59
Performing an Etch in the Normal with Delays Mode61
Performing an Etch in the Advanced Normal Mode62
Performing an Etch in the High Conductivity Mode64
Maintenance Menu66
Viewing the Full Log67
User Manager71
Configuration Menu74
System Configuration Menu75
Startup Configuration Menu76
Standby Configuration Menu78
Gas Bottle Change Parameters Menu79
Etch Configuration Menu80
Leak-Back Utility84
Main Chamber Purge85
Pressure Sensor Recalibration Utility85
Maintenance and Maintenance Schedule87
Shutting down87
Electrical and Gas Disconnect and Lockout / Tagout87
Electrical Disconnect87
Gas Supply Disconnect and Lockout / Tagout88
Panel Layouts89
Turning on the System after Maintenance89
Procedures and Schedules90
Maintenance Procedures90
Regular Inspection90
Recommended Spare Parts90
Xef 2 Bottle Change90
Bottle Change General Information90
Changing Xef2 Bottle91
Completing Bottle Change97
Adjusting Nitrogen Flow Rates98
Main Chamber98
Expansion Chamber98
Roughing Pump98
Chamber/Lid Cleaning98
Showerhead Replacement99
Showerhead Hole Plugs99
Gas Box Heater100
Vacuum Interlocks102
Chamber Interlock102
Vacuum Interlock102
Manual Valve Operation104
Ventilation Shroud Interlock105
System Startup through Normal Issues106
Xef 2 Bottle/Valve/Fitting Leak111
Leak Check Bottle #1 Connection and NPT to VCR Adapter111
Bottle and Valve Leak Check for Bottle113
Main Chamber Leak Check114
Decommissioning115
Dismantling, Demolition; Storage and Transport116
Dismantling and Demolition116
Storage116
Storage in the Clean Room116
Storage and Transport116
Breakdowns and Repairs117
What to Do in Case of a Problem117
Contacting Customer Support117
Discard118

Orbotech SPTS Xactix e1 Series - Page 32

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