Manual Version e1-4.3.0.ae-R3. Page
Due to the slightly elevated temperature inside of the etcher cabinet, you may be able to get
considerably higher XeF2 pressures.
N
2
Pressure
Nitrogen can be added into a recipe to improve selectivity. The pressure obtained in the expansion
chamber likewise controls the amount of nitrogen introduced into the process chamber.
Chill Pressure
Between each cycle, the Main Chamber can be pressurized with nitrogen which corresponds to the
Chill Pressure setting.
Chill Time
The time that the main chamber remains at the Chill Pressure between each cycle is specified by the
Chill Time.
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