Table of Contents
3BUR002418-600 A 7
Unit Overview Display....................................................................................................78
Unit Detail Display..........................................................................................................80
Unit Detail Display Format ..................................................................................80
Loading the Sequence from the Unit Detail Display ...........................................81
Loading a Recipe from the Unit Detail Display...................................................82
Changing Sequence State, Mode, and Status .......................................................82
Sequence Detail Display..................................................................................................84
Sequence Detail Display Format..........................................................................85
Choosing a Sequence for Sequence Detail...........................................................85
Changing Sequence State, Mode, and Status .......................................................85
Manipulating Sequence Steps ..............................................................................85
SFC (Sequential Function Chart) Display .......................................................................86
SFC Display Format.............................................................................................87
SFC Display Operation ........................................................................................88
Sequence Debug Display.................................................................................................91
Sequence Debug Display Format.........................................................................91
Choosing a Sequence for Debug Display.............................................................92
Sequence Source ..................................................................................................92
Changing Sequence State, Mode, and Status .......................................................92
Sequence Debug Program Functions ...................................................................92
Recipe Detail ...................................................................................................................97
Recipe Detail Display Format..............................................................................97
Changing Recipe Values ......................................................................................98
TCL Array Plot Display ..................................................................................................98
TCL Array Plot Format ........................................................................................98
Using TCL Array Plot..........................................................................................98
Batch Connectivity to M0D 300....................................................................................101
Section 5 - TLL Displays
Segment Display............................................................................................................103
Segment Display Fields and Buttons .................................................................105
Faceplates for Program Elements.......................................................................106
Register Display ............................................................................................................108