Manual Version e1-4.3.0.ae-R3. Page
NOTE: Clicking Stop Button At Lower Right Can Stop Process At Any Time
The e1 Series will proceed to clear out or purge the lines to assure all XeF
2
gas is removed from the
system lines. This will take approximately 5 minutes. You will then be instructed as below to remove the
gas bottle, refill it, and replace with full bottle. Be sure to leave the manual valve closed.
To Next Page
Loading...