3.SP Mode Tables 
57 
2-
180-
003 
Line Pos. Adj. Clear  MUSIC Result  ENG  [ 0 or 1 / 0 / 1 ] 
2-
181-
003 
Line Position Adj. Result  Skew: M  ENG*  [ -5000 to 5000 / 0 / 
0.001um ] 
2-
181-
011 
Line Position Adj. Result  M. Cor.: Dot: M  ENG*  [ -512 to 511 / 0 / 
1dot ] 
2-
181-
012 
Line Position Adj. Result  M. Cor.: Subdot: M  ENG*  [ -1 to 1 / 0 / 0.01dot ] 
2-
181-
015 
Line Position Adj. Result  Left Mag.: Subdot: M  ENG*  [ -32 to 32 / 0 / 
0.01dot ] 
2-
181-
016 
Line Position Adj. Result  Right Mag.: Subdot: M  ENG*  [ -32 to 32 / 0 / 
0.01dot ] 
2-
181-
017 
Line Position Adj. Result  S. Cor.: 600 Line: M  ENG*  [ -16384 to 16383 / 0 / 
1line ] 
2-
181-
018 
Line Position Adj. Result  S. Cor.: 600 Sub: M  ENG*  [ -1 to 1 / 0 / 
0.001line ] 
2-
181-
019 
Line Position Adj. Result  S. Cor.: 1200 Line: M  ENG*  [ -16384 to 16383 / 0 / 
1line ] 
2-
181-
020 
Line Position Adj. Result  S. Cor.: 1200 Sub: M  ENG*  [ -1 to 1 / 0 / 
0.001line ] 
2-
181-
021 
Line Position Adj. Result  Skew: C  ENG*  [ -5000 to 5000 / 0 / 
0.001um ] 
2-
181-
029 
Line Position Adj. Result  M. Cor.: Dot: C  ENG*  [ -512 to 511 / 0 / 
1dot ] 
2-
181-
030 
Line Position Adj. Result  M. Cor.: Subdot: C  ENG*  [ -1 to 1 / 0 / 0.01dot ]