166
ML-2050A/2051A/2150A
1. Error Display and How to Take a Measure
No. Display on control panel
High
voltage
Alarm
output
Measures
04 COOLANT LOW LEVEL OFF ON
Cooling water volume is insucient.
Add cooling water. If the equipment is
swayed, the coolant level may change.
Stabilize the equipment.
08 DISCHARGE RESISTOR TEMP OFF ON
Frequent repetitions of HV-ON/OFF may
cause this trouble.
Wait for a while till the discharge resistor
cools; press [TROUBLE RESET]. When
this alarm is not reset even after the above
measures, consult us.
10
HIGH TEMPERATURE OF
COOLANT
OFF ON
Check air intake or exhaust for clogging.
Clean air lter of intake as necessary.
Close the front door rmly.
If the ambient temperature exceeds 30°C,
lower it to 30°C or less. → P.39 and P.59
11
LOW TEMPERATURE OF
COOLANT
OFF ON
If the ambient temperature is low, it takes
time to raise the cooling water temperature.
Wait until the cooling water temperature
rises after the power supply is turned ON. →
P.59
12
LOW FLOW RATE OF
COOLANT
OFF ON
The cooling water ow rate is low.
The water filter or the wire net in the
oscillator is clogged. Dust o the wire net or
the water lter, or replace the water lter.
13
DEIONIZE TROUBLE
(****MΩ · cm)
OFF ON
Purity of the cooling water is low.
Allow the cooler to operate for 50–60
minutes. If this trouble still occurs, replace
the ion-exchange resin.
14 SIMMER TROUBLE OFF ON
Check the flashlamp for malfunction. If
faulty, replace it. Resistivity of the cooling
water may be low. Referring to 13, take
measures for the cooling water.
15 CHARGE TROUBLE OFF ON
Too much time is required to charge the
capacitor in the laser power supply or the
charged voltage is too high.
Check if the capacity of the power supply or
power cable is insucient.
16 BANK ALARM OFF ON
This signal is output for the control of
the bank when a trouble of undercharge,
overcharge, no-voltage or overvoltage
occurs.
In this case, consult us.
19
20
21
BRANCH SHUTTER 1 TROUBLE
BRANCH SHUTTER 2 TROUBLE
BRANCH SHUTTER 3 TROUBLE
OFF ON
A laser start signal is input while the
timesharing unit is operating.
Extend the time from input of beam select
signal to input of laser start signal. If the
trouble will continue even after the above
measures, life of rotary solenoid (driving
part) may have run out; replace it.