MKS MF1 - Page 86

Chapter 5: Process Interface
86
Example with the “Standard Output 1179 Object”
MODBUS Discrete Input
Address
Parameter
1 HighLimitAlarm
2 LowLimitAlarm
3 SystemError
4 High2LimitAlarm
5 Low2LimitAlarm
6 ValveClose
7 Purge
8 OverTemperature
9 ValveDriveAlarm
10 CalibrationRecommended
11 Uncalibrated
12 ControllerError
13 MemoryFailure
14 UnexpectedCondition
15 .. 16 Not used
17...32 ThermalMassFlowRate LSB (Byte 1 + 2)
33...64 ThermalMassFlowRate MSB (Byte 3 + 4)
65...80 InternalTemperature LSB (Byte 1 + 2)
81...96 InternalTemperature MSB (Byte 3 + 4)
97...112 ValveDriveLevel LSB (Byte 1 + 2)
113...128 ValveDriveLevel MSB (Byte 3 + 4)