STP-iXA3306 Series Turbomolecular Pump
CONTENTS (CONTINUED)
Section Title Page
5.4.21 ReadOptions 136
5.4.21.1 Second speed function setting 136
5.4.21.2 Second speed select 137
6 STP-LINK AND DISPLAY UNIT 139
6.1 STP-Link 139
6.2 Display unit 140
7 SAFETY FUNCTIONS 141
7.1 Safety functions 141
7.1.1 Power Failure 141
7.1.2 Operation after a power recovery 142
7.1.3 Abnormal state of magnetic bearing (Disturbance) 143
7.1.4 Excessive vibration (Disturbance) 143
7.1.5 Motor driver overload (DRV Overload) 143
7.1.6 Overheating inside the STP pump (MOTOR Overheat) 143
7.1.7 Overheating inside the control unit (CNT Overheat) 143
7.1.8 Overspeed 144
7.1.9 Abnormality/Error in the TMS unit (for use with the TMS unit) 144
7.2 "WARNING" function 145
7.2.1 "WARNING" function 145
7.3 Contents of WARNING function 147
7.3.1 First Damage limit 147
7.3.2 Second Damage Limit 147
7.3.3 Pump run time over 147
7.3.4 Pump Overload 148
7.3.5 Imbalance 148
7.4 WARNING function setting 149
7.5 Troubleshooting immediately after failure occurs 150
7.5.1 After power failure 150
7.5.2 After other abnormality/error 150
7.6 Troubleshooting 151
7.6.1 Indication of "FAILURE" LED (red) 151
7.6.2 Indication of "FAILURE" LED (green) 158
7.6.3 No Indication of the "FAILURE" LED 158
8 MAINTENANCE AND INSPECTION 159
8.1 Maintenance and inspection 159
8.2 Cleaning 160
8.3 Inspecting the deposit 160
8.4 Maintenance 161
8.4.1 Recommended overhaul intervals 161
8.4.2 Standard replacement parts 161
8.4.3 Recommended maintenance intervals for main parts 162
8.5 Transporting for repair or overhaul 163
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