MKS MF1 - Page 113

Appendix C: Gas Correction Factors
113
GAS SYMBOL SPECIFIC HEAT, Cp
cal/g
o
C
DENSITY
g/l @ 0
o
C
CONVERSION
FACTOR
Dichlorosilane
1,2-Dichlorotetrafluoroethane
(Freon - 114)
1,1-Difluoroethylene
(Freon - 1132A)
2,2-Dimethylpropane
Ethane
SiH
2
Cl
2
C
2
Cl
2
F
4
C
2
H
2
F
2
C
5
H
12
C
2
H
6
0.150
0.160
0.224
0.3914
0.4097
4.506
7.626
2.857
3.219
1.342
0.40
0.22
0.43
0.22
0.50
Fluorine
Fluoroform
(Freon - 23)
Freon - 11
Freon - 12
Freon - 13
F
2
CHF
3
CCl
3
F
CCl
2
F
2
CClF
3
0.1873
0.176
0.1357
0.1432
0.153
1.695
3.127
6.129
5.395
4.660
0.98
0.50
0.33
0.35
0.38
Freon - 13 B1
Freon - 14
Freon - 21
Freon - 22
Freon - 23
CBrF
3
CF
4
CHCl
2
F
CHClF
2
CHF
3
0.1113
0.1654
0.140
0.1544
0.176
6.644
3.926
4.592
3.858
3.127
0.37
0.42
0.42
0.46
0.50
Freon - 113
Freon - 114
Freon - 115
Freon - 116
Freon - C318
C
2
Cl
3
F
3
C
2
Cl
2
F
4
C
2
ClF
5
C
2
F
6
C
4
F
8
0.161
0.160
0.164
0.1843
0.185
8.360
7.626
6.892
6.157
8.397
0.20
0.22
0.24
0.24
0.17
Freon - 1132A
Helium
Hexafluoroethane
(Freon - 116)
Hydrogen
Hydrogen Bromide
C
2
H
2
F
2
He
C
2
F
6
H
2
HBr
0.224
1.241
0.1843
3.419
0.0861
2.857
0.1786
6.157
0.0899
3.610
0.43
.- - -
2
0.24
.- - -
2
1.00
Hydrogen Chloride
Hydrogen Fluoride
Isobutylene
Krypton
Methane
HCl
HF
C
4
H
8
Kr
CH
4
0.1912
0.3479
0.3701
0.0593
0.5328
1.627
0.893
2.503
3.739
0.715
1.00
1.00
0.29
1.543
0.72
(Table continued on next page)