MKS MF1 - Page 114

Appendix C: Gas Correction Factors
114
GAS SYMBOL SPECIFIC HEAT, Cp
cal/g
o
C
DENSITY
g/l @ 0
o
C
CONVERSION
FACTOR
Methyl Fluoride
Molybdenum Hexafluoride
Neon
Nitric Oxide
Nitrogen
CH
3
F
MoF
6
Ne
NO
N
2
0.3221
0.1373
0.246
0.2328
0.2485
1.518
9.366
0.900
1.339
1.250
0.56
0.21
1.46
0.99
1.00
Nitrogen Dioxide
Nitrogen Trifluoride
Nitrous Oxide
Octafluorocyclobutane
(Freon - C318)
Oxygen
NO
2
NF
3
N
2
O
C
4
F
8
O
2
0.1933
0.1797
0.2088
0.185
0.2193
2.052
3.168
1.964
8.937
1.427
.- - -
2
0.48
0.71
0.17
0.993
Pentane
Perfluoropropane
Phosgene
Phosphine
Propane
C
5
H
12
C
3
F
8
COCl
2
PH
3
C
3
H
8
0.398
0.194
0.1394
0.2374
0.3885
3.219
8.388
4.418
1.517
1.967
0.21
0.17
0.44
0.76
0.36
Propylene
Silane
Silicon Tetrachloride
Silicon Tetrafluoride
Sulfur Dioxide
C
3
H
6
SiH
4
SiCl
4
SiF
4
SO
2
0.3541
0.3189
0.1270
0.1691
0.1488
1.877
1.433
7.580
4.643
2.858
0.41
0.60
0.28
0.35
0.69
Sulfur Hexafluoride
Trichlorofluoromethane
(Freon - 11)
Trichlorosilane
1,1,2-Trichloro - 1,2,2-
Trifluoroethane
(Freon - 113)
Tungsten Hexafluoride
Xenon
SF
6
CCl
3
F
SiHCl
3
CCl
2
FCClF
2
or
(C
2
Cl
3
F
3
)
WF
6
Xe
0.1592
0.1357
0.1380
0.161
0.0810
0.0378
6.516
6.129
6.043
8.360
13.28
5.858
0.26
0.33
0.33
0.20
0.25
1.32
1
Empirically defined
2
Consult MKS Instruments, Inc. for special applications.
NOTE: Standard Pressure is defined as 1013,25 mbar (760 mmHg;14.7 psia), Standard Temperature is defined as 0
o
C.