MKS MF1 - Page 30

Chapter 4: USB Setup Interface
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Standard Input 1179 Object [SmallRecv; ObjId=20]
ResetStatus Inst 0 to 1 transition resets error status bits
SelectGasTable Inst see SigProc - SelectGasTable
EnGasCorrection Inst see Meter - EnGCF
FlowSetpoint Inst in [FLOW_UNIT] in 10E-4 steps
SetDefault Func Reset object to default values
Autozero Func see Meter - AutoZero
ResetAutozero Func see Meter - ResetAutoZero
Wink Func see Meter - Wink
ResetTotalizer Func see Meter - ResetTotalizer
Standard Output 1179 Object [SmallSend; ObjId=21]
Name
Par.
Type
Description
HighLimitAlarm Inst see SigProc - TripPointHighAlarm
LowLimitAlarm Inst see SigProc - TripPointLowAlarm
SystemError Inst any severe error condition
High2LimitAlarm Inst see SigProc - TripPointHigh2Alarm
Low2LimitAlarm Inst see SigProc - TripPointLow2Alarm
ValveClosed Inst
(THERMAL_MASS_FOW_RATE < 1%) && (VALVE_OVERWRITE ==
FLOW_OFF)
Purge Inst THERMAL_MASS_FLOW_RATE > 110%
OverTemperature Inst INTERNAL_TEMP > MAX_TEMP
ValveDriveAlarm Inst VALVE_DRIVE_LEVEL > MAX_VTP
CalibrationRecommended Inst TIME_TO_CAL count down expired
Uncalibrated Inst if a disabled or no table is used
ControllerError Inst abs (set - flow) greater for a longer time period
MemoryFailure Inst E2PROM checksum error
UnexpectedCondition Inst any process error condition
ThermalMassFlowRate Inst in [FLOW_UNIT] in 10E-4 steps;
InternalTemperature Inst temperature in [°C] (in 10E-4) steps; see System - InternalTemp
ValveDriveLevel Inst
0..100% (in 10E-4 steps´)
0% = valve is closed
100% = valve is in purge position (full open)
see Valve - ValvePosition
SetDefault Func Reset object to default values
Full Output 1179 Object [FullSend; ObjId=22]
Name
Par.
Type
Description
HighLimitAlarm Inst see SigProc - TripPointHighAlarm
LowLimitAlarm Inst see SigProc - TripPointLowAlarm
SystemError Inst see SmallSend - SystemError
High2LimitAlarm Inst see SigProc - TripPointHigh2Alarm
Low2LimitAlarm Inst see SigProc - TripPointLow2Alarm
ValveClosed Inst see SmallSend - ValveClosed