MKS MF1 - Page 34

Chapter 4: USB Setup Interface
34
Controller Object [Controller; ObjId=28]
SoftStartRate Inst 0.0 .. 3600.0 in [sec]
SlewRate Inst 0.0 .. 3600.0 in [sec]
SpHystLow Inst Setpoint off in [%]
SpHystHigh Inst Setpoint on in [%]
SetDefault Func Reset object to default values
Sensor Object [Sensor; ObjId=29]
Name
Par.
Type
Description
FlowValue Inst Actual flow in % uncalibrated
FullScaleN2 Inst Maximum flow of MF1 in sccm of N2
SetDefault Func Reset object to default values
Actuator (Valve) Object [Valve; ObjId=30]
Name
Par.
Type
Description
ValvePosition Inst
0..100%
0% = valve is closed
100% = valve is in purge position (full open)
ValveOverride Inst [normal, Valve Close, Valve Purge]
ValveType Inst [Meter, Controller Normally Close]
SetDefault Func Reset object to default values
Signal Processing Object [SigProc; ObjId=31]
Name
Par.
Type
Description
TripPointHighAlarm Inst (flow > HIGH_LIMIT), Hysteresis = 0.5%)
TripPointLowAlarm Inst (flow < LOW_LIMIT), Hysteresis = 0.5%
TripPointHigh2Alarm Inst (flow > HIGH2_LIMIT), Hysteresis = 0.5%)
TripPointLow2Alarm Inst (flow < LOW2_LIMIT), Hysteresis = 0.5%
TripPointHigh Inst -10% .. + 120% full scale
TripPointLow Inst -10% .. + 120% full scale
TripPointHigh2 Inst -10% .. + 120% full scale
TripPointLow2 Inst -10% .. + 120% full scale
FilterSettling Inst 0.0 .. 1000.0 in [sec]
DefaultTable Inst 0 .. 14 is the default table, 15 function (y=x) is the gas table
SelectGasTable Inst 0..14; 15 = default gas table is used
SetDefault Func Reset object to default values