MKS MF1 - Page 35

Chapter 4: USB Setup Interface
35
Gas Calibration Object [CalTable; ObjId=32]
Name
Par.
Type
Description
Instance Inst Show the Instance of the Object
GasName Inst e.g N2
GasNumber Inst Gas Semi Number
ZeroTempCoef Inst Zero Drift Compensation Factor
SpanTempCoef Inst Span Drift Compensation Factor
CalTemp Inst Internal Temperature while Calibration
SensorOffset Inst Sensor Offset correction
SensorSpan Inst Sensor Span correction
FullScaleCal Inst Fullscale for calibration table
FlowUnit Inst
Calibration FlowUnit
[SCCM, SLM, SCCH, SLH, SCMM, SCMH, SCFM, SCFH, USER_MIN,
USER_HOUR]
USER_MIN => user defined UNIT counted in minutes if not exists jet.
USER_HOUR => user defined UNIT counted in hours if not exists jet.
GasTableLength Inst
2..21 = table with 2..21 points
0 or 1 = disable table
SensorValue0 Inst sensor Value
FlowValue0 Inst flow Value
SensorValue1 Inst ...
FlowValue1 Inst ...
SensorValue ... Inst ...
FlowValue ... Inst ...
Pointer Inst TBD
SetDefault Func Reset object to default values
StoreSensorValue Func TBD
Controller Calibration Object [ControllerTable; ObjId=33]
Name
Par.
Type
Description
Instance Inst Show the Instance of the Object
ControllerP Inst Valve Controller proportional value
ControllerI Inst Valve Controller integral value
ControllerD Inst Valve Controller derivativ value
SetDefault Func Reset object to default values
Acceleration Setup Object [AccelSetup; ObjId=34]
Name
Par.
Type
Description
Instance Inst Show the Instance of the Object
SetpointFilter Inst Setpoint Filter
StartAddGain Inst Start additional Gain