MKS MF1 - Page 93

Chapter 5: Process Interfaces
93
0x34F9
UnexpectedConditio
n 0 UnexpectedCondition USINT ro
any process
error condition
0x34FA
ThermalMassFlowR
ate 0 ThermalMassFlowRate DINT ro
in [FLOW_UNIT]
in 10E-4 steps;
0x34FB InternalTemperature 0 InternalTemperature DINT ro
temperature in
[°C] (in 10E-4)
steps; see
System -
InternalTemp
0..100% (in 10E-
4 steps´)
0% = valve is
closed
100% = valve is
in purge position
(flull open)
0x34FC ValveDriveLevel 0 ValveDriveLevel DINT ro
see Valve -
ValvePosition
0x38EB Model 0 Model
STRING(32
) rw MF1..
0x38EC SerialNumber 0 SerialNumber
STRING(16
) rw G123456G20
0x38F2 CalDate 0 CalDate STRING(7) rw
Date of
calibration
0x38F3 UserTag 0 UserTag
STRING(32
) rw
any 32 character
string
0x37F3 RunHours 0 RunHours DINT ro
run time in hours