MKS MF1 - Page 92

Chapter 5: Process Interface
92
0x33F4 SelectGasTable 0 SelectGasTable USINT rw
0..14; 15 =
default gas table
is used
0x33F5 EnGasCorrection 0 EnGasCorrection USINT rw
enable global
GCF [0 =
disabled, 1 =
enabled]
0x33F6 FlowSetpoint 0 FlowSetpoint DINT rw
in [FLOW_UNIT]
in 10E-4 steps
0x34EC HighLimitAlarm 0 HighLimitAlarm USINT ro
(flow >
HIGH_LIMIT),
Hysteresis =
0.5%)
0x34ED LowLimitAlarm 0 LowLimitAlarm USINT ro
(flow <
LOW_LIMIT),
Hysteresis =
0.5%
0x34EE SystemError 0 SystemError USINT ro
any severe error
condition
0x34EF High2LimitAlarm 0 High2LimitAlarm USINT ro
(flow >
HIGH2_LIMIT),
Hysteresis =
0.5%)
0x34F0 Low2LimitAlarm 0 Low2LimitAlarm USINT ro
(flow <
LOW2_LIMIT),
Hysteresis =
0.5%
0x34F1 ValveClosed 0 ValveClosed USINT ro
(THERMAL_MA
SS_FOW_RATE
< 1%) &&
(VALVE_OVER
WRITE ==
FLOW_OFF)
0x34F2 Purge 0 Purge USINT ro
THERMAL_MAS
S_FLOW_RATE
> 110%
0x34F3 OverTemperature 0 OverTemperature USINT ro
INTERNAL_TEM
P > MAX_TEMP
0x34F4 ValveDriveAlarm 0 ValveDriveAlarm USINT ro
VALVE_DRIVE_
LEVEL >
MAX_VTP
0x34F5
CalibrationRecomm
ended 0 CalibrationRecommended USINT ro
TIME_TO_CAL
count down
expired
0x34F6 Uncalibrated 0 Uncalibrated USINT ro
if a disabled or
no table is used
0x34F7 ControllerError 0 ControllerError USINT ro
abs (set - flow)
greater for a
longer time
period
0x34F8 MemoryFailure 0 MemoryFailure USINT ro
E2PROM
checksum error