Page 123
Flow Sensor Over Pressure Limits
The flow sensor in the Sprint LC can be damaged by too much pressure.
The Sprint LC automatically monitors the pressure and will stop a flow
test if the pressure is too high. The below table shows the maximum
pressure associated with each flow range.
Flow Range Over Pressure Limit
10 sccm 15 psig Max
50 sccm 15 psig Max
200 sccm 15 psig Max
1,000 sccm 15 psig Max
5,000 sccm 60 psig Max
20,000 sccm 60 psig Max
Status Box Messages
P ERR Pressure was above or below the pressure error
window at the end of the test time.
HIGH Flow exceeded maximum flow setpoint.
LOW Flow did not reach minimum flow setpoint.
OVER The pressure was above the maximum pressure
the flow sensor can withstand.
To Next Page
Loading...
