142
Input/Output/Measurement Specications
Voltage generation accuracy
Range Set voltage range
Voltage generation
accuracy
(±% of setting ±% f.s.)
Time from the START
signal to voltage output
10 V 0.1 V to 10.0 V 0.1 + 0.05 0.1 ms max.
100 V 10.1 V to 100.0 V 0.1 + 0.05 0.1 ms max.
1000 V 100.1 V to 1000.0 V 0.1 + 0.05 0.1 ms max.
2000 V * 1000.1 V to 2000.0 V 0.2 + 0.10 0.1 ms max.
* The 2000 V range applies only to Model SM7120.
Voltage generation
current limiter
See “4.9 Limiting Current Flowing Through Measured Object (Current Limiter)” (p. 65).
Resistance
measurement
accuracy
(Resistance measurement accuracy) = (Current measurement accuracy) + (Voltage
generation/measurement accuracy)
The measured or set voltage is used as the voltage for resistance measurement.
If a calculation set voltage is used, the resistance measurement accuracy shall be
considered as a reference and is not guaranteed.
Resistance value display range
Exponential notation
Applied voltage
Range
Resolution
0.1 V 10 V 100 V 1000 V 2000 V
20 pA 0.1 fA 5E+9
Ω
to 1E+15
Ω
500E+9
Ω
to 100E+15
Ω
5E+12
Ω
to 1E+18
Ω
50E+12
Ω
to 10E+18
Ω
100E+12
Ω
to 20E+18
Ω
200 pA 1 fA
500E+6
Ω
to 100E+12
Ω
50E+9
Ω
to 10E+15
Ω
500E+9
Ω
to 100E+15
Ω
5E+12
Ω
to 1E+18
Ω
10E+12
Ω
to 2E+18
Ω
2 nA 10 fA 50E+6
Ω
to 10E+12
Ω
5E+9
Ω
to 1E+15
Ω
50E+9
Ω
to 10E+15
Ω
500E+9
Ω
to 100E+15
Ω
1E+12
Ω
to 200E+15
Ω
20 nA 100 fA 5E+6
Ω
to 1E+12
Ω
500E+6
Ω
to 100E+12
Ω
5E+9
Ω
to 1E+15
Ω
50E+9
Ω
to 10E+15
Ω
100E+9
Ω
to 20E+15
Ω
200 nA 1 pA 500E+3
Ω
to 100E+9
Ω
50E+6
Ω
to 10E+12
Ω
500E+6
Ω
to 100E+12
Ω
5E+9
Ω
to 1E+15
Ω
10E+9
Ω
to 2E+15
Ω
2 µA 10 pA 50E+3
Ω
to 10E+9
Ω
5E+6
Ω
to 1E+12
Ω
50E+6
Ω
to 10E+12
Ω
500E+6
Ω
to 100E+12
Ω
1E+9
Ω
to 200E+12
Ω
20 µA 100 pA 5E+3
Ω
to 1E+9
Ω
500E+3
Ω
to 100E+9
Ω
5E+6
Ω
to 1E+12
Ω
50E+6
Ω
to 10E+12
Ω
100E+6
Ω
to 20E+12
Ω
200 µA 1 nA 1E+3
Ω
to 100E+6
Ω
50E+3
Ω
to 10E+9
Ω
500E+3
Ω
to 100E+9
Ω
5E+6
Ω
to 1E+12
Ω
10E+6
Ω
to 2E+12
Ω
2 mA 10 nA 1E+3
Ω
to 10E+6
Ω
5E+3
Ω
to 1E+9
Ω
50E+3
Ω
to 10E+9
Ω
500E+3
Ω
to 100E+9
Ω
1E+6
Ω
to 200E+9
Ω
The instrument displays values that include the input resistance of 1k
Ω
(±10%).
Decimal notation with unit prefix
Applied voltage
Range
Resolution
0.1 V 10 V 100 V 1000 V 2000 V
20 pA 0.1 fA 5 G
Ω
to 1 P
Ω
500 G
Ω
to 100 P
Ω
5 T
Ω
to 1000 P
Ω
50 T
Ω
to 10000 P
Ω
100 T
Ω
to 20000 P
Ω
200 pA 1 fA 500 M
Ω
to 100 T
Ω
50 G
Ω
to 10 P
Ω
500 G
Ω
to 100 P
Ω
5 T
Ω
to 1000 P
Ω
10 T
Ω
to 2000 P
Ω
2 nA 10 fA 50 M
Ω
to 10 T
Ω
5 G
Ω
to 1 P
Ω
50 G
Ω
to 10 P
Ω
500 G
Ω
to 100 P
Ω
1 T
Ω
to 200 P
Ω
20 nA 100 fA 5 M
Ω
to 1 T
Ω
500 M
Ω
to 100 T
Ω
5 G
Ω
to 1 P
Ω
50 G
Ω
to 10 P
Ω
100 G
Ω
to 20 P
Ω
200 nA 1 pA 500 k
Ω
to 100 G
Ω
50 M
Ω
to 10 T
Ω
500 M
Ω
to 100 T
Ω
5 G
Ω
to 1 P
Ω
10 G
Ω
to 2 P
Ω
2 µA 10 pA 50 k
Ω
to 10 G
Ω
5 M
Ω
to 1 T
Ω
50 M
Ω
to 10 T
Ω
500 M
Ω
to 100 T
Ω
1 G
Ω
to 200 T
Ω
20 µA 100 pA 5 k
Ω
to 1 G
Ω
500 k
Ω
to 100 G
Ω
5 M
Ω
to 1 T
Ω
50 M
Ω
to 10 T
Ω
100 M
Ω
to 20 T
Ω
200 µA 1 nA 1 k
Ω
to 100 M
Ω
50 k
Ω
to 10 G
Ω
500 k
Ω
to 100 G
Ω
5 M
Ω
to 1 T
Ω
10 M
Ω
to 2 T
Ω
2 mA 10 nA 1 k
Ω
to 10 M
Ω
5 k
Ω
to 1 G
Ω
50 k
Ω
to 10 G
Ω
500 k
Ω
to 100 G
Ω
1 M
Ω
to 200 G
Ω
The instrument displays values that include the input resistance of 1k
Ω
(±10%).