Hitachi IJ UX - Page 307

3
1
1
1
140
5
1.2
0.7
20
5
1
2
MV1: Supply
Step
UX
Remarks
[Shut down]→[Shut down] or [Circulation Control] - [Cleaning stop]
Sequence Name
1
High-
voltage OFF
1
2.ON
2.ON
Operation
Outline
Cleaning stop
MV8: Cleaning
3.ON
MV5: Circulation
MV6: Pressure relief
－
1.ON
ON
2
Interval
3.ON
ON
2.ON
3.ON
4.ON
2.ON
1.ON
1.ON
ON
ON
1.ON
4.ON
5
3.ON
4.ON
2.ON
1.ON
3.ON
5.ON
1.ON
2.ON
ON
ON
5.ON
ON
7
3.ON
4.ON
2.ON
1.ON
9
3.ON
4.ON
Eject Makeup
4
20
3.ON
ON
5.ON
1.ON
ON
2.ON
1.ON
ON
10
3.ON
2.ON
1.ON
3.ON
2.ON
1.ON
1.ON
4.ON
3.ON
1.ON
ON
ON
ON
ON
2.ON
1.ON
ON
ON
1.ON
1.ON
2.ON
2.ON
4.ON
6
3
3
3.ON
4.ON
2.ON
Pressure-
relief the
supply path
Check the
MV8 OFF
11
Pump
MV9: Shutoff
MV2: Replenishment
MV3: Recovery
MV4: Agitation
MV7: Makeup
12
13
3
8
Pressurize
the makeup
path
Time [sec.]
14
Pressure-
relief the
supply path
Pressure-
relief
16
15
Suck the circulation / recovery path
Reduce the
7-7