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7 Rotate the gear counterclockwise and remove the gear.
8 Install the new gear in reverse order of the procedures above.
When installing, coat the gear teeth with the silicone grease.
(Use Silicone Grease G501 made by Shin-etsu Chemical Co., Ltd.)
4.8.6 Recovery pump2 drive unit replacement procedure
1 Turn off the power supply.
2 Perform “4.1.3 Access to the parts on the rear side of the equipment”, “(1) Access
method from the front” and open the unit door.
[Caution] Be careful not to catch the tubes.
3 Remove the wires from clamps (2 positions).
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