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7 Rotate the gear counterclockwise and remove the gear.   
 
 
 
 
 
 
 
 
 
 
 
 
8 Install the new gear in reverse order of the procedures above. 
When installing, coat the gear teeth with the silicone grease. 
    (Use Silicone Grease G501 made by Shin-etsu Chemical Co., Ltd.)   
 
 
 
4.8.6 Recovery pump2 drive unit replacement procedure 
 
 
1 Turn off the power supply. 
 
2  Perform  “4.1.3  Access  to  the  parts  on  the  rear  side  of  the  equipment”,  “(1)  Access 
method from the front” and open the unit door. 
 [Caution] Be careful not to catch the tubes. 
 
3 Remove the wires from clamps (2 positions).