5-7
５ Remove the fixing screws (2 locations)
and remove the coupling cover.
ï¼– Remove MGV holder and
Nozzle-IN Joint holder.
ï¼— Take up the shutoff valves (MV9/MV29), remove
the Makeup IN joint and the shutoff valves (MV9/MV29).
When the O-ring (P2.2) is remained in the
heating unit, remove it.
８ (1) Put the MGV filter, O-ring 3.9, O-ring 2.2 and O-ring 1.7 into the respective holes
of the joint parts of new MV9/MV29.
Perform the assembly after dipping the O-ring in makeup and
confirm that the O-ring does not jump out of the hole.
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