Edwards nEXT85 - List of Tables

List of Tables
Table 1: Checklist of items........................................................................................................... 19
Table 2: Water cooling block supply requirements..................................................................... 34
Table 3: Command
abbreviaons................................................................................................ 36
Table 4: Power limit seng......................................................................................................... 37
Table 5: Analogue signal
opons................................................................................................. 41
Table 6: Vent valve opons..........................................................................................................46
Table 7: Valve types..................................................................................................................... 47
Table 8: Vent restrictor
orice diameter if venng the vacuum system chamber.......................48
Table 9: Serial enable matrix....................................................................................................... 52
Table 10: Behaviour of a pump when the power is re-instated aer an electrical supply
failure..................................................................................................................................... 56
Table 11: Service ags................................................................................................................. 60
Table 12: Command set error codes............................................................................................68
Table 13: Flashing service codes..................................................................................................69
Table 14: Flashing error codes..................................................................................................... 69
Table 15: Hexadecimal conversion table..................................................................................... 71
Table 16: Status
ag.....................................................................................................................71
Table 17: Example decoding of system status words...................................................................72
Table 18: Service tool kits............................................................................................................ 75
Table 19: Service kits................................................................................................................... 75
Table 20: Inlet screens................................................................................................................. 76
Table 21: Inlet strainers............................................................................................................... 76
Table 22: Inlet
ange seals and integrated inlet screens.............................................................76
Table 23: Inlet strainers............................................................................................................... 77
Table 24: Air cooler......................................................................................................................79
Table 25: Water cooler................................................................................................................ 80
Table 26: Bakeout band............................................................................................................... 80
Table 27: TAV5 vent valve and vent port adaptor........................................................................80
Table 28: VRX vent restrictor....................................................................................................... 81
Table 29: Vent port adaptor........................................................................................................ 81
Table 30: PRX purge restrictor..................................................................................................... 81
Table 31: Interface cable..............................................................................................................81
Table 32: Auxiliary connector...................................................................................................... 82
Table 33: Auxiliary extension cable............................................................................................. 82
Table 34: Auxiliary 'Y' cable adaptor............................................................................................ 83
Table 35: Base
mounng adaptor................................................................................................83
Table 36: Operang and storage condions................................................................................84
Table 37: General technical data................................................................................................. 84
Table 38: Pump performance data.............................................................................................. 86
Table 39: Crical backing pressure.............................................................................................. 86
Table 40: Vent gas specicaon and vent control....................................................................... 89
Table 41: Purge gas specicaon.................................................................................................90
Table 42: Water cooling block supply requirements................................................................... 90
Table 43: Logic interface technical data.......................................................................................91
Table 44: Logic interface connector pins..................................................................................... 93
Table 45: Summary of commands that can be sent to the pump................................................95
Table 46: Summary of commands that can be sent to the pump - Vent
opons 1..................... 98
Table 47: Summary of commands that can be sent to the pump - Vent opons 2..................... 99
Table 48: Motor controller technical data................................................................................. 101
Table 49: Indicator LEDs............................................................................................................ 102
B8G0-00-880A - List of Tables
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