Edwards nEXT85 User Manual

Pump performance data
Table 38
Pump performance data
Parameter nEXT85D nEXT85H nEXT85D nEXT85H nEXT85D nEXT85H nEXT85D nEXT85H
Mass 3.0 Kg 3.0 Kg 4.4 Kg 4.4 Kg 3.2 Kg 3.2 Kg 2.9 Kg 2.9 Kg
Main inlet
port
ISO63 ISO63 CF63 CF63 ISO100 ISO100 NW40 NW40
Exhaust
port
NW16 NW16 NW16 NW16 NW16 NW16 NW16 NW16
Vent port 1/8 inch 1/8 inch 1/8 inch 1/8 inch 1/8 inch 1/8 inch 1/8 inch 1/8 inch
BSP BSP BSP BSP BSP BSP BSP BSP
Main inlet pumping speed:
N
2
(l s
-1
) 84 84 84 84 86 86 47 47
He (l s
-1
) 78 78 78 78 80 78 61 61
H
2
(l s
-1
) 60 54 60 54 60 54 49 49
Ar (l s
-1
) 80 80 80 80 84 84 44 44
Peak compression rao from the backing port to the main inlet port:
N
2
> 10
11
> 10
11
> 10
11
> 10
11
> 10
11
> 10
11
> 10
11
> 10
11
He 8x10
6
2x10
7
8x10
6
2x10
7
8x10
6
2x10
7
8x10
6
2x10
7
H
2
2x10
5
5x10
5
2x10
5
5x10
5
2x10
5
5x10
5
2x10
5
5x10
5
Ar > 10
11
> 10
11
> 10
11
> 10
11
> 10
11
> 10
11
> 10
11
> 10
11
Ulmate
pressure
(mbar)
< 5x10
-9
< 5x10
-9
< 5x10
-10
< 5x10
-10
< 5x10
-9
< 5x10
-9
< 5x10
-9
< 5x10
-9
Note:
Pumping speeds quoted are without inlet screens. Inlet screens may reduce the pumping
speed by up to 20%.
Table 39
Crical backing pressure
Parameter nEXT85D nEXT85H
N
2
19 mbar 21 mbar
He 19 mbar 21 mbar
H
2
30 mbar 30 mbar
Ar 22 mbar 21 mbar
B8G0-00-880A - Technical Reference
Page 86

Edwards nEXT85 Specifications

General

Brand	Edwards
Model	nEXT85
Category	Water Pump
Language	English