Maintain the nEXT85
WARNING:
When removing the pump, ensure personal protecve equipment is used to safeguard
against damage from failed components and possible accumulaon of hazardous material
that may have been pumped. Check that the pump is vented to atmosphere and at a safe
temperature. Be wary of possible spillages, sharp edges and debris. Removal of the pump
inlet screen will always expose the risk of injury from sharp edges.
WARNING:
Allow the pump rotor to stop and then disconnect the motor controller before you remove
the pump from your vacuum system for maintenance or fault nding procedures.
Bearing and oil cartridge
maintenance
The oil cartridge and oil-lubricated bearing must be replaced when it
reaches the end of its service life. This is typically aer 35,000 hours.
Rotor life The fague life of nEXT85 Turbomolecular pump rotors is typically 40,000
to 50,000 cycles. As a precauonary measure, Edwards recommends that
pumps are returned for a major service (rotor replacement) aer 20,000
cycles of acceleraon to full speed and back to a stop, or aer ten years
of use, whichever occurs rst.
Cleaning the pump If the inside of the pump is contaminated, it may not be possible to
achieve the specied ulmate vacuum performance, or pump-down
mes may increase.
Decoding service status words The service status may be accessed directly via the serial link. This
method of accessing service status will give the most complete picture of
current and future service requirements and will allow preventave
maintenance acvies to be scheduled.
Controller run me The run hours and recommended service me of the controller on the
nEXT85 pump can be monitored.
Pump run me The run hours and recommended service me of the rotor in the nEXT85
pump can be monitored.
Pump cycles The number of start-stop cycles completed and the number remaining
unl the next service is due can be monitored.
Bearing run me The run hours and recommended service me of the bearing in the
nEXT85 pump can be monitored.
Oil cartridge run me The run hours and recommended service me of the oil cartridge in the
nEXT85 pump can be monitored.
B8G0-00-880A - Maintain the nEXT85
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