Edwards nEXT85 - System Connection Procedures

Figure 1
Typical pumping system with a nEXT pump
1. Vacuum system
2. High vacuum gauge
3. Vibraon damper
4. Inlet screen
5. nEXT pump
6. Backing valve
7. Vacuum gauge
8. Flexible bellows
9. Foreline trap (for rotary pump)
10. Backing pump (Rotary vane or scroll
pump)
11. Mist lter (for rotary pump) / silencer
(for scroll pump)
12. Vent valve
13.
Alternave posion for vent valve
14. Radial air cooler
15. PRX purge restrictor
16. Regulated purge gas supply
17. WCX water cooler and
connecons
18. Axial air cooler
Note:
An interstage port is available on the ‘i’ variant but is not shown.
Connect to the vacuum system
WARNING:
Install the pump in the vacuum system before connecng the motor controller to the
power supply. This will ensure that the pump cannot operate and injure people during
installaon.
B8G0-00-880A - Install the nEXT85
Page 20