Overview of the nEXT85
A nEXT85 pump consists of a turbomolecular pump with a permanently aached motor
controller containing drive electronics.
The motor controller controls the electrical supply to the pump. It allows manual adjustment of
standby speed, all other controls can only be operated through the logic interface. To operate
the nEXT85 pump, connect it to the customer control equipment and power supply or,
alternavely, use the Edwards TIC Turbo Instrument Controller, TIC Turbo Controller or TAG
Controller (see Electrical data on page 91).
WARNING:
Improper use of the equipment could cause damage to it or injury to people. The user is
responsible for the safe operaon, installaon and monitoring of the system.
WARNING:
The pump and motor controller contains electrolyc capacitors and, under certain fault
condions, may emit dangerous fumes. Ensure that the pump and motor controller is
operated in a well-venlated area.
CAUTION:
Do not aempt to separate the motor controller from the pump as this will cause damage
to the electrical connecons.
The motor controller drives the brush-less motor in the pump. There are two main variants of
the nEXT85 pump:
• The ‘D’ or ‘Duplex’ variant contains turbomolecular blades and a drag mechanism
allowing operaon at higher backing pressures than pure turbomolecular pumps.
• The ‘H’ or ‘High Compression’ variant employs the same technology as the 'D' variant,
but is tuned to deliver higher compression.
Also available is an ‘iD’ or ‘iH’ interstage variant, which provides an interstage port between the
turbomolecular blades and drag mechanism.
nEXT85 pumps are supplied with an inlet screen ed into the centering O-ring for ISO and
NW40 version pumps and into the envelope for CF version pumps. The inlet screen protects
the pump against damage that would be caused by debris entering the pump.
The nEXT85 pumps have a vent port for venng the pump and vacuum system to atmospheric
pressure. The pump is supplied with a manual vent valve ed; this can be replaced with a
TAV5 solenoid-operated vent valve (available as accessories - refer to Accessories for the
nEXT85 on page 78). The TAV valve can be directly controlled by the on-board motor
controller.
The nEXT85 pumps have a purge port: an inert purge gas can be introduced to protect the
bearing and motor from corrosion. An oponal vent port adapter and purge restrictor can be
ed to the purge port to control the ow rate of the purge gas and to lter the gas supply.
Refer to Accessories for the nEXT85 on page 78.
A forced air cooling kit and a water-cooling block are available as oponal accessories to cool
the nEXT85 pumps. Refer to Accessories for the nEXT85 on page 78.
B8G0-00-880A - Overview of the nEXT85
Page 12