Oxford Instruments Mercury iTC User Manual

Handbook
November 2011 / 59-UMC0071 / Issue 01
Mercury iTC
Page 7Original Instructions
10.1 Nomenclature used in this section ............................................................................... 105
10.2 SCPI and legacy command sets .................................................................................... 105
10.3 SCPI command messages ............................................................................................. 105
10.3.1 SCPI protocol conventions ........................................................................................... 105
10.3.2 Command structure ..................................................................................................... 106
10.3.3 Verbs ............................................................................................................................ 106
10.3.4 Nouns ........................................................................................................................... 106
10.3.4.1 System commands................................................................................................... 107
10.3.4.2 Addressing a temperature sensor ............................................................................ 108
10.3.4.3 Addressing a heater controller ................................................................................. 110
10.3.4.4 Addressing a level meter sensor .............................................................................. 110
10.3.4.5 Addressing an auxiliary I/O daughter board ............................................................ 112
10.3.4.6 Addressing a control loop ........................................................................................ 113
10.3.5 Invalid responses ......................................................................................................... 113
10.4 Legacy command messages ......................................................................................... 113
11 TECHNICAL SPECIFICATIONS ...................................................................................... 115
11.1 Physical specification .................................................................................................... 115
11.2 Electrical power supply .................................................................................................. 115
11.3 Sensor inputs .................................................................................................................. 115
11.4 Heater outputs ................................................................................................................ 116
11.5 PC interfaces ................................................................................................................... 116
11.6 Electrical isolation .......................................................................................................... 117
11.7 Environmental specifications ........................................................................................ 117
12 THEORY OF CONTROL LOOPS .................................................................................... 119
12.1 General information on control loops .......................................................................... 119
12.2 General information on temperature control loops ..................................................... 119
12.2.1 Open loop operation .................................................................................................... 120
12.2.2 On-Off control .............................................................................................................. 120
12.2.3 Proportional control ...................................................................................................... 121
12.2.4 Proportional control with integral action ....................................................................... 122
12.2.5 Proportional control with integral and derivative action ................................................ 123
12.2.6 North American terminology ........................................................................................ 123
12.2.7 PID tables .................................................................................................................... 124
12.2.7.1 PID table operation................................................................................................... 124
12.2.7.2 Entering a PID table ................................................................................................. 124
12.3 Theory of gas-flow control ............................................................................................. 125
12.3.1 Overview of gas control ............................................................................................... 125
12.3.2 Manual control of the gas flow ..................................................................................... 125
12.3.3 Automatic control of the gas flow ................................................................................. 125
12.3.4 Heater target tables ..................................................................................................... 126
13 TEMPERATURE SENSOR DAUGHTER BOARD ........................................................... 127
13.1 Overview of the temperature sensor board ................................................................. 127
13.2 Installing a temperature sensor board ......................................................................... 127
13.2.1 Fitting the board ........................................................................................................... 127
13.2.2 Connecting the sensor ................................................................................................. 128
13.2.3 Configuring the temperature sensor board .................................................................. 128
14 HEATER DAUGHTER BOARD ....................................................................................... 129
14.1 Overview of the heater board ........................................................................................ 129

Oxford Instruments Mercury iTC Specifications

General

Brand	Oxford Instruments
Model	Mercury iTC
Category	Controller
Language	English