Atom Incu i 101 - Page 76

Troubleshooting
74
r “Close the humidity chamber cover.”
YES
NO
NO
YES
NO
NO
YES
YES
The humidity chamber cover is
closed.
The humidity chamber cover is
damaged.
Close the humidity chamber cover.
Defect of the humidity chamber
cover
The connector of the position
detection board is connected
properly.
Connect the connector of the
position detection board securely.
The alarm message is still
displayed even after the position
detection board is replaced with a
functional one.
Failure of the position detection
board
Failure of the control board