(16) Velocity error
(17) Master feedback position
(18) Slave feedback position
(19) Yaw position
(20) Run position command
(21) Effective gain
(22) Internal feedback position
(23) Gantry linear command current
(24) Gantry yaw command current
(25) Gantry yaw position error
(66) RST //servo drive reset input signal
(67) DOG //near home sensor input signal
(68) HOM //servo drive built-in homing procedure input signal
(69) MAP //servo drive error map input signal
(70) FSTP //forced stop input signal
(71) CLR //position deviation clear input signal
(72) ALM //alarm output signal
(73) COIN //positioning completion output signal
(74) V-CMP //velocity reach output signal
(75) TGON //rotation detection/movement detection output signal
(76) D-RDY //drive ready output signal
(77) S-RDY //servo ready output signal
(78) CLT //torque limit detection output signal
(79) VLT //velocity limit detection output signal
(80) BK //brake control output signal
(81) WARN //warning output signal
(82) NEAR //positioning near output signal
(83) PSELA //command pulse multiplication switching output
signal
(84) PT //position trigger digital output signal
(85) DBK //external dynamic brake output signal
(86) HOMED //servo drive homing completion output signal
(87) PAO //encoder divided pulse output signal-A phase
(88) PBO //encoder divided pulse output signal-B phase
(89) PZO //encoder divided pulse output signal-Z phase
(90) INDEX //index signal
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