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Keithley 6517B Reference Manual

Keithley 6517B
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Model 6517B Electrometer Reference Manual Section 4: Basic measurements
6517B-901-01 Rev. C / August 2015 4-29
MEAS-TYPE
The MEAS-TYPE option is used to select and configure the measurement type for the ohms function.
RESISTANCE: Use this menu item to configure the ohms function to make normal resistance
measurements.
RESISTIVITY: Use this menu item to configure the ohms function to make surface or volume
resistivity measurements If the Model 6517B is already configured to use the Model 8009 Resistivity
Test Fixture (see "FIXTURE-MODEL" below) then the interlock cable MUST be connected to that test
fixture. Measurement type (surface or volume) is automatically selected by the switch position on the
test fixture. Attempts to change measurement type from the menu is ignored. If the interlock cable is
not connected, then the settings for volume or surface do not work properly, and you are not be able
to change measurement type from the menu.
SURFACE: Select this option to make surface resistivity measurements. After the option is selected,
the following menu items are used to configure the resistivity measurement:
MODEL-8009: Use this option if you are using the Model 8009 Resistivity Test Fixture. This option
automatically sets the parameters for the surface resistivity calculation since the electrode
dimensions are known.
USER: Use this option if using another manufacturer’s test fixture or a custom-built test fixture. After
selecting this option you are prompted to enter the value for Ks.
VOLUME: Select this option to make volume resistivity measurements. After the option is selected,
the following menu items are used to configure the resistivity measurement:
THICKNESS: Use to specify (in millimeters) the thickness of the sample.
FIXTURE-MODEL: Use this menu item to select the test fixture that you are going to use:
MODEL-8009: Select this option if using the Model 8009 Resistivity Test Fixture. This option
automatically sets the parameters for the volume resistivity calculation since the electrode
dimensions are known.
USER: Use this option if using another manufacturer’s test fixture, or a custom-built test fixture.
This option is also used for the Model 8009 test fixture if using an effective area coefficient less
than one (B < 1). After selecting this option you are prompted to enter the value for Kv.
VSOURCE
The VSOURCE menu item is used to select either AUTO V-source or MANUAL V-source:
MANUAL: Select this option if you wish to manually set the V-source range and level for the ohms
function.
AUTO: Select this option if you wish the Model 6517B to automatically select the optimum V-
source range and level for the ohms function; 40.000 V for the 2 M through 200 G ranges, and
400.00 V for the 2 T through 200 T ranges. With AUTO V-source selected, you are not able to
manually set the V-source range or level while in the ohms function.
A hazardous voltage (400 V) may automatically be set for the ohms function when AUTO V-
source is selected. See the table in
Ohms ranges
(on page 4-19) for the ohms ranges that
use the high voltage.

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Keithley 6517B Specifications

General IconGeneral
Input Impedance>200 TΩ
Electrometer TypeElectrometer/High Resistance Meter
Current Measurement Range20 fA to 20 mA
DisplayVacuum Fluorescent Display
Communication InterfacesIEEE-488 (GPIB), RS-232
Power Supply100 V / 120 V / 220 V / 240 V; 50 Hz / 60 Hz
Resistance Measurement RangeUp to 200 TΩ

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