Newport ESP300 Series

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6-6 Section 6 – Servo Tuning

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Warranty2
Limitation of Warranty2
EU Declaration of Conformity4
Table of Contents5
Section 1 - Introduction15
Scope15
Safety Considerations16
Conventions and Definitions17
Definitions and Symbols17
Terminology19
System Overview20
Features20
Specifications21
Descriptions of Front Panel Versions22
Rear Panel Description23
Figure 1.3: Rear Panel of the ESP30024
System Setup25
Line Voltage25
First Power on25
Quick Start26
Connecting Motion Devices26
Motor on27
Homing27
First Jog28
Section 2 - Modes of Operation31
Overview of Operating Modes31
LOCAL Mode31
REMOTE Mode31
Operation in LOCAL Mode32
Accessing the Menu32
Navigating the Menu32
Changing Values32
Motion from the Front Panel33
Detailed Description of Menu Items35
Section 3 - Remote Mode41
Programming Modes41
Remote Interfaces44
IEEE488 Interface45
Software Utilities46
Command Syntax47
Summary of Command Syntax48
Command Summary49
AB Abort Motion50
Table 3.5.2: Command List - Alphabetical55
AC Set Acceleration57
Description of Commands57
AE Set E-Stop Deceleration63
AF Set Acceleration Feed-Forward Gain65
AP Abort Program68
BA Set Backlash Compensation70
BG Assign DIO Bits to Execute Stored Programs71
BK Assign DIO Bits to Inhibit Motion73
BL Enable DIO Bits to Inhibit Motion73
BM Assign DIO Bits to Notify Motion Status74
BN Enable DIO Bits to Notify Motion Status75
BO Set DIO Port A, B Direction76
BP Assign DIO Bits for Jog Mode79
BQ Enable DIO Bits for Jog Mode79
CL Set Closed Loop Update Interval82
DB Set Position Deadband82
DC Setup Data Acquisition83
DD Get Data Acquisition Done Status84
DE Enable/Disable Data Acquisition86
DF Get Data Acquisition Sample Count86
DG Get Acquisition Data88
DH Define Home89
DL Define Label90
DO Set Dac Offset91
DP Read Desired Position92
EO Automatic Execution on Power on94
EP Enter Program Mode95
ES Define Event Action Command String96
EX Execute a Program98
ST Stop Motion138
SU Set Encoder Resolution173
TB Read Error Message178
TE Read Error Code179
TJ Set Trajectory Mode180
TP Read Actual Position181
TS Read Controller Status182
TV Read Actual Velocity183
TX Read Controller Activity184
UF Update Servo Filter185
UH Wait for DIO Bit High186
UL Wait for DIO Bit Low187
VA Set Velocity188
VB Set Base Velocity for Step Motors189
VE Read Controller Firmware Version190
VF Set Velocity Feed-Forward Gain191
VU Set Maximum Velocity192
WP Wait for Position193
WS Wait for Motion Stop193
WT Wait193
XM Read Available Memory196
Erase Program197
ZA Set Amplifier I/O Configuration198
ZB Set Feedback Configuration201
ZE Set E-Stop Configuration206
ZH Set Hardware Limit Configuration207
ZS Set Software Limit Configuration212
ZZ Set System Configuration212
Grouping215
Defining Group Parameters216
Making Linear Move217
Making Contours218
Figure 4.1: a Contour with Multiple Circular Moves219
Figure 4.3: Block Diagram of Via Point Data Handling by Command Processor220
Miscellaneous Commands221
Table 4.1: Slave to a Different Stage Steps222
Table 4.2: Slave to a Trackball Steps223
Table 4.3: Slave to a Joystick Steps223
Feature Implementation224
Table 4.4: an Example of Closed Loop Stepper Motor225
Figure 4.5: Block Diagram of Closed Loop Stepper Motor Positioning225
Table 4.5: Closed Loop Stepper Positioning Commands226
Synchronize Motion to External and Internal Events226
Using DIO to Inhibit Motion228
Table 4.6: Commands to Synchronize Motion to External Events229
Motion Systems231
Specification Definitions232
Following Error233
Local Accuracy234
Figure 5.3A: High Accuracy for Small Motions235
Resolution236
Repeatability237
Figure 5.7: Hysteresis Plot238
Pitch, Roll and Yaw239
Wobble240
Maximum Velocity241
Velocity Regulation242
Combined Parameters243
PID Servo Loops244
Figure 5.14: P Loop245
Feed-Forward Loops246
Figure 5.17: Trapezoidal Velocity Profile247
Motion Profiles248
Figure 5.20: Trapezoidal Motion Profile249
Home Search250
Figure 5.22: Home (Origin) Switch and Encoder Index Pulse251
Encoders252
Figure 5.26: Encoder Quadrature Output253
Figure 5.28: Optical Encoder Read Head254
Figure 5.30: Two-Channel Optical Encoder Scale and Read Head Assembly255
Motors256
Figure 5.32: Four-Phase Stepper Motor257
Figure 5.34: Energizing Two Phases Simultaneously258
Figure 5.37: Timing Diagram, Continuous Motion (Ideal)259
Figure 5.39: Single Phase Energization260
Stepper Motor Types261
DC Motors262
Drivers263
Figure 5.44: Simple Stepper Motor Driver264
Unipolar-Bipolar Drivers265
DC Motor Drivers266
Figure 5.50: DC Motor Current Driver267
PWM Drivers268
Tuning Principles269
Correcting Axis Oscillation270
Points to Remember272
Table 6.1: Servo Parameter Functions273
Hand-Held Keypad275
Description of Keys276
Appendix A – Error Messages277
Appendix B – Trouble-Shooting/Maintenance285
Table B.1: Trouble-Shooting Guide Descriptions286
B.2 Fuse Replacement288
B.3 Cleaning289
Table C.1: Digital Connector Pin-Outs291
Appendix C – Connector Pin Assignments291
Table C.2: Driver Card Connector Pin-Outs292
C.1.3 Motor Driver Card (25-Pin) I/O Connector292
C.1.4 Signal Descriptions (Motor Driver Card 25-Pin I/O Connector)293
C.1.5 Auxiliary Encoder Inputs295
Table C.3: Auxiliary Encoder Connector Pin Outs296
Table C.4: IEEE488 Interface Connector296
C.1.7 RS-232C Interface Connector (9-Pin D-Sub)296
C.1.8 RS-232C Interface Cable297
Figure C.3: Motor Interlock Connector (BNC) with Dust Cap298
Table D.1: Binary Conversion Table, Using Decimal and299
Appendix D – Binary Conversion Table299
Appendix E – System Upgrades305
E.1 Adding Axes306
E.2 Adding IEEE488307
E.3 Changing the Front Panel Option308
Appendix F – ESP Configuration Logic309
Figure F.1: Configuration Logic310
Appendix G – Programming Non-ESP Compatible Stages311
Table H.1: Technical Customer Support Contacts313
Appendix H – Factory Service313
H.1 Service Form314

Newport ESP300 Series - Page 274

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