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Newport ESP300 Series - Page 281

Newport ESP300 Series
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x01 PARAMETER OUT OF RANGE
The specified parameter is out of range. Refer to the description of
issued command for valid parameter range.
x02 AMPLIFIER FAULT DETECTED
There was an amplifier fault condition.
x03 FOLLOWING ERROR THRESHOLD EXCEEDED
The real position of specified axis was lagging the desired position by
more encoder counts than specified with the
FE command. Refer to
the description of
ZF command to configure the motion controller
tasks upon encountering a following error.
x04 POSITIVE HARDWARE LIMIT DETECTED
The motion controller sensed a high level at its positive travel limit
input. Refer to the description of
ZH command to configure the
motion controller tasks upon encountering a hardware limit.
x05 NEGATIVE HARDWARE LIMIT DETECTED
The motion controller sensed a high level at its negative travel limit
input. Refer to the description of
ZH command to configure the
motion controller tasks upon encountering a hardware limit.
x06 POSITIVE SOFTWARE LIMIT DETECTED
The motion controller sensed that the axis has reached positive
software travel limit. Refer to the description of
SR command to
specify the desired positive software travel limit. Also, refer to thew
description of
ZS command to configure the motion controller tasks
upon encountering a software limit.
x07 NEGATIVE SOFTWARE LIMIT DETECTED
The motion controller sensed that the axis has reached negative
software travel limit. Refer to the description of
SL command to
specify the desired negative software travel limit. Also, refer to the
description of
ZS command to configure the motion controller tasks
upon encountering a software limit.
x08 MOTOR / STAGE NOT CONNECTED
The specified axis is not connected to the driver.
x09 FEEDBACK SIGNAL FAULT DETECTED
There was a feedback signal fault condition. Ensure that the encoder
feedback is relatively noise free.
Appendix A – Error Messages A-5

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