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General| Gas Analysis | Yes |
|---|---|
| Measurement Principle | Quadrupole Mass Spectrometry |
| Mass Range | 1 - 100 amu |
| Response Time | 100 ms |
| Communication Interface | RS-232 |
| Filament Type | Tungsten |
| Mounting | Conflat flange |
| Bakeout Temperature | 150°C |
| Operating Temperature | 40 °C |
| Detectable Mass Range | 1-100 amu |
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