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General| Gas Analysis | Yes |
|---|---|
| Measurement Principle | Quadrupole Mass Spectrometry |
| Mass Range | 1 - 100 amu |
| Response Time | 100 ms |
| Communication Interface | RS-232 |
| Filament Type | Tungsten |
| Mounting | Conflat flange |
| Bakeout Temperature | 150°C |
| Operating Temperature | 40 °C |
| Detectable Mass Range | 1-100 amu |
Safety warnings and precautions for using the Transpector CPM.
Explains the function and application of the Transpector CPM system.
Contact information and procedures for support and service.
Detailed technical specifications of the Transpector CPM's performance.
Information on physical dimensions and mounting requirements.
Details the electrical power input and specifications for the system.
Explains the requirement for nitrogen purge gas in corrosive systems.
Details the air pressure requirements for operating the system.
Outlines the vacuum levels required for proper system operation.
Specifies the minimum computer system requirements for FabGuard Explorer.
Provides a step-by-step overview of the system installation process.
Instructions for installing the electronics module, heat guard, and cable box.
Guidance on mounting the pumping system directly to a process chamber.
Instructions for installing the CPM controller unit.
Explains how the cable box connects to various system subcomponents.
Details the connections and installation of the CPM foreline pump.
Explains static vs. dynamic IP addresses and their preference.
States the default IP address and methods for changing it.
Guides on deciding network setup before connecting the CPM.
Alternative method to change computer IP for communication.
Identifies and illustrates the main components of the CPM system.
Provides a general overview of the instrument's functionality.
Describes the available input and output ports for the CPM.
Describes the solenoid valves, their activation, and types.
Introduces sample inlet systems and their typical uses.
Explains the high pressure sampling method using orifice bypass.
Identifies the three main components of the Transpector CPM sensor.
Details the closed ion source and its pressure reducing orifice.
Explains how the quadrupole mass filter separates ions by mass-to-charge ratio.
Overview of the ion detector region, including EM.
Guides on interpreting mass spectra, including qualitative and quantitative analysis.
Explains how to identify substances from mass spectrum peaks.
Introduces the HexBlock, its features, and advantages.
Explains the calibration functions using gas mixtures.
Details the heater system and its temperature settings.
Overview of the pumping system and its configuration options.
Covers filament control including interlocks and calibration.
Explains the function of the pneumatic pressure switch and gauge.
Outlines safety precautions before performing maintenance.
General procedures for maintenance tasks on the system.
General instructions and precautions for all repair procedures.
Lists necessary tools, materials, and parts for maintenance.
Procedure for changing diaphragms in the foreline pump.
Maintenance procedures for the Transpector sensor components.
Maintenance procedures for the HexBlock inlet system.
Steps to diagnose and correct communication issues.
A chart listing symptoms, causes, and remedies for CPM issues.
Contact information for ordering INFICON services and parts.
Lists consumable parts for the CPM system with part numbers.
Lists spare parts available for replacement.
Overview of operating the Transpector CPM with FabGuard Explorer.
Guides on connecting FabGuard Explorer to the Transpector CPM.
Details the CPM tab within the RGA Configuration window.
Configuration of valves and orifices within the HexBlock inlet system.
Overview of the Configuration Monitor for parameter experimentation.
Parameters that determine the data collected by the Transpector CPM.
Explains the Spectrum (Scans) and Selected Masses (Bins) acquisition modes.
Details how to acquire data from the CPM system.
Sets the ionization energy for data collection (Low or High).
Defines how and when the sensor starts acquiring data.
Defines how and when data acquisition stops.
Determines how long data is collected at each point.
Adds wait time after the sensor completes a scan.
Defines Baseline correction and Peak Lock settings.
Defines which inlet opens for the run and if it closes afterwards.
Heating a vacuum chamber to accelerate desorption of species.
Ion source with higher pressure in ionization region than the analyzer.
Part of sensor converting ion beam into electrical signal.
Kinetic energy of ionizing electrons in an electron bombardment ion source.
In situ amplifier for increasing mass spectrometer sensitivity.
Part of mass spectrometer where neutral molecules are ionized.
Part of spectrometer separating ions by mass to charge ratio.
Instrument ionizing, separating, and detecting ions.
Mass filter of four parallel electrodes arranged in a square array.
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