6–4
Transpector CPM Operating Manual
6.1.2.1 High Mass FC5311 Tuning Reference
The FC5311 Tuning Reference Gas option is available for adjusting peak position
for 300 AMU CPMs. It is controlled via a manual valve. FC5311 Tuning Reference
Gas is a volatile liquid. It is located at the inlet of the high vacuum pump.
A bakeout must be performed if FC5311 Tuning
Reference Gas is sampled. Up to 24 hours of pumping
may be required to remove all trace levels.
The perfluorophenanthrene liquid in the FC5311 Tuning Reference has a high
molecular weight and a vapor pressure of 100 Pa (1 Torr) at 22°C (71.6°F). The
mass spectrum is given as mass and characteristic peak intensity in Table 6-3. The
masses of abundant peaks can be used with the Tune option of FabGuard Explorer
to calibrate the mass scale, particularly for 200 AMU and 300 AMU sensors.
Table 6-3 Mix 2: FC5311 reference mass spectrum
70 eV, peak intensity ranging 1–100%
Mass Intensity Mass Intensity
55 1.83 219 2.66
56 1.09 231 4.06
57 2.97 243 7.66
69 100 255 2.09
70 1.17 267 2.55
93 5.97 286 2.09
94 1.27 293 7.65
100 11.09 305 1.14
112 1.50 317 2.27
119 16.80 331 1.12
124 1.49 343 1.17
131 47.08 367 1.88
143 5.26 405 4.23
155 3.05 455 18.30
162 5.64 505 4.41
169 7.66 517 1.17
181 11.23 555 4.62
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