Inficon Transpector CPM User Manual

4–4
Transpector CPM Operating Manual
4.3.1.4 One Analog Input
One analog input is differential and can handle inputs between 0 to +10 volts and
common mode voltages of 100 volts. See Table 4-3.
NOTE: The analog input is supported through FabGuard software.
Figure 4-2 CPM Aux I/O pinout diagram
4.3.2 Ultra-High Vacuum System
The vacuum system provides low pressure to:
 establish a sample flow from the process by pressure difference.
 provide low pressure for optimum operation of the sensor.
A dry pumping system comprised of a Turbo Molecular Pump and Foreline Pump
is used to minimize hydrocarbons in the residual gas background.
The Turbo Molecular Pump provides a high compression ratio between the high
vacuum side and the Foreline Pump side for all gases, including hydrogen.
Hydrogen is the major residual gas component in ultra-high vacuum. The high
compression ratio for hydrogen is important for producing a low base pressure.
Table 4-3 2 analog inputs
ANALOG INPUT 1 (+) PIN 9
ANALOG INPUT 1 (-) PIN 10

Inficon Transpector CPM Specifications

General

Brand	Inficon
Model	Transpector CPM
Category	Industrial Equipment
Language	English