7–1
Transpector CPM Operating Manual
Chapter 7
Maintenance
7.1 Introduction
The sensor, Turbo Molecular Pump, Foreline Pump, and HexBlock are subject to
aging and will eventually require repair or replacement.
NOTE: The Transpector electronics module and CPM controller modules rarely
require repair or maintenance.
INFICON provides complete service for both sensors and electronics modules.
(Refer to section 1.4, How to Contact INFICON, on page 1-4.)
7.2 Safety Considerations
If Transpector CPM is used in a manner not specified by
the manufacturer, the protection provided by
Transpector CPM may be impaired.
Transpector CPM maintenance should only be performed
by qualified personnel.
There are no user serviceable parts inside the
Transpector electronics or the CPM controller modules.
WARNING - Risk Of Electric Shock
Before any maintenance is performed, Transpector CPM
must be disconnected or isolated from its power source
(AC mains) and the Turbo Molecular Pump must be at
rest.
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