Inficon Transpector CPM - How the CPM System Works; CPM Components

4–1
Transpector CPM Operating Manual
Chapter 4
How the CPM System Works
4.1 CPM Components
A fully configured CPM corrosive pumping system is illustrated in Figure 4-1. (The
CPM controller and foreline diaphragm pump are not shown.)
Figure 4-1 CPM pumping system components
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5
4
3
2
1
14
12
11
9
10
6
1 . . . . . .Process Pressure Gauge
2 . . . . . .Process Connection (CF40, KF40 or KF25)
3 . . . . . .HexBlock™ Inlet
4 . . . . . .Optional Calibration Reference
5 . . . . . .CPM Sensor (inside manifold)
6 . . . . . .Sensor Manifold and Heater
7 . . . . . .CPM Transpector Electronics Module
8 . . . . . .Pressure Switch
9 . . . . . .Valve Solenoids
10 . . . . .Nitrogen Regulator (for nitrogen purge and valve operation)
11 . . . . .Integrated Foreline Block
12 . . . . .UHV Turbo Molecular Pump
13 . . . . .Foreline Pirani Gauge
14 . . . . .Bypass Connection for High Pressure Applications
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