Inficon Transpector CPM - Maintenance Procedures

7–3
Transpector CPM Operating Manual
7.3 Maintenance Procedures
7.3.1 Bakeout of Quadrupole
If the CPM Symptom—Cause—Remedy Chart on page 8-2 suggest that the
sensor is contaminated, try first to restore normal performance by baking the
sensor under a high vacuum
—at least 1 x 10
-5
Torr (1.333 x 10
-5
mbar)
[1.333 x 10
-3
Pa]—for several hours, preferably overnight. Table 7-1 represents
the maximum bakeout temperatures.
If baking the sensor doesn’t increase sensor performance, do section 7.7.2,
Transpector Sensor Filament Replacement, on page 7-18 and do section 7.7.3,
Transpector Sensor Ion Source Replacement, on page 7-20.
If the problem remains, contact INFICON. (Refer to section 1.4, How to Contact
INFICON, on page 1-4.
)
CAUTION
When heating the sensor above 200C, the electronics
module and the signal contact must be removed from the
sensor.
7.3.2 Spare Heating Jacket
INFICON offers several heating jackets to help in baking a sensor. These heating
jackets operate at a maximum temperature of 150
C. (Refer to section 1.4 on page
1-4.)
Table 7-1 Maximum bakeout temperatures
While
Operating
With
Electronics
Removed
Faraday Cup Sensors 200
C300C
Electron Multiplier
Faraday Cup
Combination
EM Mode
FC Mode
150
C
200
C
300
C
300
C