Inficon Transpector CPM - Vacuum Requirements

1–14
Transpector CPM Operating Manual
1.11 Vacuum Requirements
1.11.1 Required Vacuum
The Turbo Molecular Pump and Foreline Pump create vacuum. The Foreline Pump
must provide <10 Torr (13 mbar) when there is up to 30 sccm of nitrogen purge plus
process gas bypass flow.
CAUTION
Do not exceed 10 Torr (13 mbar) Foreline Pump pressure.
1.11.2 Acceptable Range Of Vacuum
The CPM manifold can achieve <1x10
-8
Torr (1.33x10
-8
mbar) of base pressure (no
sample flow) after bakeout and cool down. This level of vacuum requires a foreline
pressure of <10 Torr (13 mbar).
1.12 Environmental Requirements
1.12.1 Use
Indoor use only.
1.12.2 Altitude Range
Up to an altitude of 2000 m (6561 ft.)
Contact INFICON for operation at higher altitudes.
1.12.3 Maximum Humidity
80% relative humidity (no condensation)
1.12.4 Pollution Degree
Pollution Degree 2 (per EN61010-1:2001)
1.12.5 Maximum Operating Temperature
50°C (122°F) Transpector Electronics Module
35°C (95 °F) for the turbo pump under maximum gas load
1.12.6 Minimum Operating Temperatures
20°C (68°F)