Inficon Transpector CPM User Manual

7–17
Transpector CPM Operating Manual
7.7.1 How to Determine if a Filament Kit Replacement is Required
Do these steps to determine if a filament replacement is required.
1 Measure the resistance of the filament while the sensor is under vacuum by
measuring the resistance between pins 3 and 10. (See Figure 7-16). A failed
filament will measure open while an intact filament will measure 0.8 
Figure 7-16 Sensor pinout
NOTE: Although the following measurements may measure below 30 M with the
filament assembly and ceramic shield in place, they must be above 30 M
when measured with the filament assembly and ceramic shield removed.
Table 7-2 Pin assignment
Pin Assignment Pin Assignment
1 PP 8 GND
2 EM HV 9 RF+
3 Filament 10 Filament
4 Reserved 11 Reserved
5 Anode 12 Focus
6 RF- 13 TP
7 GND
1
2
3
4
5
6
7
8
9
10
11
12
13

Inficon Transpector CPM Specifications

General

Brand	Inficon
Model	Transpector CPM
Category	Industrial Equipment
Language	English