6–5
Transpector CPM Operating Manual
6.1.3 Process Gauge (CDG)
The Capacitance Diaphragm Gauge (CDG) measures the pressure based on the
elastic deformation of a ceramic diaphragm. The capacitance change caused by
the deflection is converted into a linear output signal proportional to pressure. The
CDG is resistant to high pressure surges.
The CDG type is selected based on process conditions. (See Table 6-4.) Select a
gauge based on maximum pressure orifice. The CDG range must be equal to or
the next higher range than the highest pressure orifice (typically V2 or the sniffer).
6.2 Heaters
A Transpector CPM software interlock will turn on the heater only when the Turbo
Molecular Pump is at normal speed (72,000 RPM). There are two temperature
settings: low (90°C); high (150°C).
l
6.3 Pumping System
The pumping system is preconfigured at the factory. The pumping system can be
reconfigured with a different:
Foreline Pump, either System Controlled or customer supplied
Turbo Molecular Pump, either standard or corrosive
Inlet arrangement, the type of inlet and/or orifices
Calibration reference
193 6.73 605 1.64
205 2.82 624 1.00
217 2.05
Table 6-3 Mix 2: FC5311 reference mass spectrum
70 eV, peak intensity ranging 1–100%
Mass Intensity Mass Intensity
Table 6-4 Hex block process pressure gauge
Process Range Part Number
1 Torr range 964-208-G11
10 Torr range 964-208-G12
100 Torr range 964-208-G13
1000 Torr range 964-208-G14
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