Inficon Transpector CPM - Transpector CPM Performance Specifications

1–5
Transpector CPM Operating Manual
1.5 Transpector CPM Performance Specifications
1.5.1 General Specifications
Table 1-1 General specifications
Mass Range (AMU) 1 – 100 1 – 200 1 – 300
Resolution <1 AMU wide @ 10% peak height over entire mass range
(per AVS 1993 recommended practice)
Total Pressure Range
1
5x10
-7
–1x10
-3
Torr (6.6x10
-7
–1.3x10
-3
mbar)
Total Pressure
Accuracy
2
±25% 1x10
-6
–1x10
-3
Torr (1.3x10
-6
–1.3x10
-3
mbar)
Maximum Ion Source
Operating Pressure
3
1x10
-3
Torr (1.3x10
-3
mbar)
Nominal Operating
Pressure
4
2x10
-4
Torr (2.6x10
-4
mbar)
System Operating
Pressure
1x10
-8
Torr (1.3x10
-8
mbar)–1.2 atmospheres (with proper inlet configuration)
Sensitivity
@ Low Emission
@ High Emission
Amps/Torr (Amps/mbar)
>4x10
-6
(>3x10
-6
)
>2x10
-5
(>1.5x10
-5
)
Amps/Torr (Amps/mbar)
>2x10
-6
(>1.5x10
-6
)
>1x10
-5
(>7.6x10
-6
)
Amps/Torr (Amps/mbar)
>1x10
-6
(>7.6x10
-7
)
>5x10
-6
(>3.8x10
-6
)
Minimum Detectable
Partial Pressure
5
1x10
-13
Torr
(1.3x10
-13
mbar)
2x10
-13
Torr
(2.6x10
-13
mbar)
4x10
-13
Torr
(5.3x10
-13
mbar)
Maximum Data Rate
(analog scans OR
selected peaks)
1.8 ms per point
(555 data points per second)
Abundance Sensitivity
6
<5 ppm <10 ppm <100 ppm
Zero Blast
7
<2 ppm <25 ppm <200 ppm
Detection Limit
8
<1 ppm <2 ppm <4 ppm
Linearity
9
±20%