Inficon Transpector CPM User Manual

9–3
Transpector CPM Operating Manual
9.3 Preventative Maintenance Parts
The following preventative maintenance kits should be readily available.
9.4 Replacement Spare Parts
The following spare parts should be readily available.
Table 9-2 Preventative maintenance kits
INFICON Part Number Description
923-712-G1 Spare HexBlock Orifice Gaskets (pack of five)
923-711-G1 HexBlock Valve Replacement Kit
923-710-G1 HexBlock Orifice Replacement Tools
964-710-G1 CPM Tungsten Filament Kit
964-710-G2 CPM Coated Filament Kit
964-711-G1 CPM Tungsten Ion Source Kit
964-711-G2 CPM Tungsten Ion Source Kit with Anode Liner
964-712-G1 CPM Coated Ion Source Kit
964-712-G2 CPM Coated Ion Source Kit with Anode Liner
923-418-G1 Replacement Diaphragm Kit for Two-Stage Pump
Table 9-3 Replacement spare parts
INFICON Part Number Description
964-403-P1 CPM Manifold Heater
059-0400 Replacement C-ring
032-0079 Turbo Molecular Pump (with CF40 flange)
923-403-P2 CPM Valve Block
964-208-G11 1 Torr CPM CDG
964-208-G12 10 Torr CPM CDG
964-208-G13 100 Torr CPM CDG
964-208-G14 1000 Torr CPM CDG
964-230-G1 CPM Cable Box Assembly
923-417-G1 Foreline Check Valve Kit

Inficon Transpector CPM Specifications

General

Brand	Inficon
Model	Transpector CPM
Category	Industrial Equipment
Language	English